The semiconductor industry relies on a complex interplay of off-site and on-site production processes, advanced machine tools, and clean environment to maintain the high standards required for semiconductor device manufacturing. Each stage, from bulk delivery to cleanroom operations, is supported by specialized technologies and components from Parker to ensure purity, precision, and efficiency.
Off-site production is crucial, involving the manufacturing and preparation of materials at separate locations to streamline the supply chain. Key processes include bulk filling, cylinder filling, and Ultra High Purity (UHP) gas handling. Bulk filling ensures a continuous supply of essential materials, while cylinder filling requires precise control to maintain gas purity and pressure standards. UHP gas handling involves delivering gases with extremely low impurity levels to prevent contamination. Parker’s UHP fittings, UHP valves, and UHP pressure regulators play a critical role in maintaining these stringent purity standards.
On-site production directly manages essential materials within the manufacturing facility, ensuring immediate availability and precise control. This is critical for applications like deionized (DI) water handling, chemical fluids handling, and UHP gas handling. Parker’s plastic tubing, PTFE hose, and UHP valves ensure the purity and precision required for these processes.
Bulk delivery ensures large volumes of high-purity fluids and gases are transported to semiconductor fabs, maintaining purity throughout the process, supported by Parker’s instrumentation valves and dry break couplings. Once on-site, fluids and gases are stored in specialized tanks designed to maintain their purity and stability. The distribution system comprises a network of pipelines delivering fluids and gases to various points within the fab, ensuring they remain uncontaminated. Parker’s UHP fittings and metal seals are essential in maintaining the integrity of these distribution systems.
The facility room houses essential support systems like HVAC, power supply units, water treatment facilities, and gas distribution systems. These systems ensure stable environmental conditions and supply necessary utilities to other parts of the plant. Gas compression systems increase the pressure of gases like nitrogen, oxygen, and hydrogen to meet operational requirements, utilizing Parker’s nitrogen gas generators and hydraulic pumps. Gas purification systems ensure the ultra-high purity of gases, preventing defects and ensuring high-quality production, with Parker’s advanced filtration technologies playing a crucial role. Bulk chemical and gas distribution systems efficiently transport large volumes of chemicals and gases, maintaining consistency and safety, supported by Parker’s instrumentation manifolds and UHP pressure regulators. Slurry storage handles abrasive slurries used in Chemical Mechanical Planarization (CMP), ensuring their integrity and efficiency with Parker’s abrasion-resistant fluid conveyance solutions.
The sub-fabrication room, located below the cleanroom, contains critical infrastructure such as pumps, exhaust systems, and chemical delivery systems. It supports cleanroom operations by managing waste, providing chemical feeds, and maintaining pressure differentials to prevent contamination. Water deionization produces high-purity DI water essential for cleaning and rinsing wafers, with DI water polishing further purifying the water to achieve ultra-high purity levels. Parker’s advanced filtration systems and UHP valves ensure the purity and smooth flow of DI water. Fluid distribution systems deliver chemicals and slurries to different parts of the semiconductor fabrication process, ensuring efficient and safe distribution with Parker’s thermoplastic hose and PTFE hose. Gas distribution systems deliver high-purity gases like nitrogen, oxygen, and hydrogen to different process areas, with precise control and safety measures, particularly for flammable gases, supported by Parker’s UHP fittings and electric linear actuators.
The cleanroom is the core of a semiconductor manufacturing plant, featuring stringent contamination controls to maintain ultra-clean environments for wafer and microchip fabrication. Fluid distribution systems deliver chemicals, deionized water, and other process fluids to various tools and processes within the cleanroom, requiring precise control mechanisms to ensure accurate fluid delivery, supported by Parker’s electric cylinders and servo motors. Wet benches are specialized workstations used for processing wafers through various wet chemical steps, ensuring uniform chemical exposure and safe handling of corrosive chemicals, with Parker’s PFA and PTFE valves and pressure regulators. Thermal management systems manage the heat generated by semiconductor manufacturing equipment, maintaining optimal performance with Parker’s water chillers. Valve Manifold Boxes (VMB) control the distribution of process gases to various tools, maintaining gas purity and ensuring leak prevention with Parker’s UHP stainless steel fittings and metal seals. Gas cabinets store and distribute specialty gases used in semiconductor processes, handling toxic, flammable, or corrosive gases with utmost safety and control, supported by Parker’s instrumentation valves and pressure regulators.
Fan decks maintain cleanroom integrity by eliminating microscopic particle contamination and ensuring precise control of air and fluid flow rates. Parker’s high-efficiency HEPA and ULPA filters, along with chemical filters, ensure the air remains contaminant-free. Fluid conveyance systems offer high-purity tubing and fittings, while advanced sealing solutions withstand demanding environments, exemplifying the technological sophistication required to support the standards of fan deck systems in the semiconductor industry.
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